Agilent  8500 Field Emission Scanning Electron Microscope (FE-SEM)


 Beam voltage   500 to 2000V
 Beam current   0.2 to 1 nA
 Resolution   <10nm at 1000V
 Magnification  250 to 65,000 X
 Digital zoom   10X
 Scan field   1 x 1mm (max)
 Electron source   Schottky field emission
 Detector modes   SE, BSE, Topo
 Sample size 100 x 60mm (max)
Sample thickness 30mm (max)
Viewable area 50 x 30mm (max)
 Sample mounts Standard SEM stubs
Electrical activation Vacuum feedthrough
 System Control
PC Windows 7
Basic user interface Simple image capture and controls
 Expert user interface Expert image optimization
 Image formats JPEG, TIFF, BMP, PNG
 Image resolution User selectable up to 2048 x 2048 pixels
Scan rate Slow scan to video rate
 Noise reduction Frame and pixel averaging
Motorized Stage
 Piezo stage 1 µm accuracy
 X, Y, Z travel 50 x 50 x 10mm
Vacuum System
Chamber vacuum 1 e-4 Torr
 Pumpdown time 3 minutes
Turbo pump 80 liters per second
UHV pump Ion pump with gettering
Microscope 584(W) x 470(D) x 584(H)mm; 72kg
 Pump unit 203(W) x 254(D) x 203(H)mm; 4kg
 Installation Requirements
Power 100/120/220-240VAC; 50/60Hz
Operating temperature 5 to 40°C
Humidity 20 to 80% RH
 Compressed air Not required
Dry nitrogen Not required
Water cooling Not required