2 axes deposition manipulator
Description
The 2 Axes Motorised MBE Manipulator is a high precision, high rigidity, UHV specimen manipulator of modular construction, suitable for a range of R1 motorised continuous substrate rotation and Z translation. It is prepared to heat the substrate up to 1400°C with accuracy +/- 1°C. The station includes the substrate (sample holder) positioner and allows precise angular position of substrate in relation to linear shutter.
Application
The 2 Axes Motorised MBE Manipulator is designed for MBE applications under ultra-high vacuum conditions. Heating is via resistive and EB methods. The Manipulator can work in the vertical orientation.
Technical data
| Positional control Z | Handwheel |
| Positional control R1 | Servomotor |
| Pressure range: | 1 bar to 10-11mbar |
| Sample cooling temperature | down to 7K |
| Operating temperature | -25°C to +60°C |
| Bakeout temperature | 150°C |
| Standard base flange | DN 200CF |
| Shutter | Pneumatic operated |
| Sample temperature | ‹ 1400ºC (±1ºC) |
| Z range | 50 mm |
| Resolution (manual/motorised) | 5 μm / 1 μm |
| R1 range | 360° - continuous |
| Resolution (motorised) | 0.1° |
| Max speed | 80 rpm |