4 axes manipulator



The 4 Axes Manipulator is a high precision, high rigidity, UHV specimen manipulator of modular construction, suitable for a range of X, Y, Z and R1 motions. The modular construction means that the specification can be upgraded or modified by the addition or replacement of well defined modules. All axes of the manipulator are operated manually by using a handwheel, micrometers or rotary feedthrough. The standard mounting flange is DN 100CF or DN 160CF and the standard travelling flange is DN 40CF (optionally DN 63CF). The 4 Axes Manipulator is a combination of XY Stage, Z Slide and Rotation Stage.


The 4 Axes Manipulators are used for manipulating sample holders and scientific tools with respect to a sample’s position. These manipulators, when combined with sample holders, allow precise placement and manipulation of samples in UHV environments. The manipulators themselves move the sample in three orthogonal axes, X, Y, and Z while the rotary drive provides rotation R1 around Z axis. They can work in any orientation.

Additional information

The 4 Axes Manipulators are configured with a Sample Receiving Station that accepts one of our ‘PTS’ range of sample holders. The station is equipped with 6 electrical contacts (2 x thermocouple type K, C or E; 2 x sample bias up to 1000V, 2 x heating current up to 20A) and sapphire ball cooling contact for liquid nitrogen cooling. The manipulator includes all of the necessary electrical, gas and mechanical feedthroughs. It can also be fully motorised in the same way as individual motorisation of the XY Stages, Z Slides and Rotation Modules.

Technical data

Positional control X, Y Micrometer
Positional control Z Handwheel
Positional control R1 Rotary feedtdrough
Pressure range 1 bar to 10-11 mbar
Operating temperature -25°C to +60°C
Bakeout temperature 150°C
Standard base flange DN 100CF or DN 160CF
Travelling flange DN 40CF or DN 63CF
XY range ± 12.5 mm
Resolution (manual/motorised) 5 μm / 1 μm
Z range 75 ÷ 800 mm
Resolution (manual/motorised) 50 μm / standard 10 μm
(1 μm on request)
R1 Range ± 180°
Resolution (manual) 0.5° / 0.1°