5 Axes Manipulator



The 5 Axes Manipulator with X, Y, Z, R1, R2 Axes Motorised is a high precision, high rigidity, UHV specimen manipulator of modular construction, suitable for a range of X, Y, Z, R1 and R2 motions. The modular construction means that the specification can be upgraded or modified by the addition or replacement of well defined modules. All axes of the manipulator are motorised by stepper motors. The X, Y and Z axes may also be operated manually by as required. The standard mounting flange is DN 100CF or DN 160CF. The 5 Axes Manipulator is a combination of XY Stage, Z Slide and Rotation Stages.


The 5 Axes Manipulators are used for manipulating sample holders and scientific tools with respect to a sample’s position. These manipulators, when combined with sample holders, allow precise placement and manipulation of samples in UHV environments. The manipulators themselves move the sample in three orthogonal axes, X, Y, and Z while the rotary drives provide rotation R1 and R2 around the Z and Y axes. They can work in any orientation.

Additional information

The 5 Axes Manipulators are configured with a Sample Receiving Station that accepts one of our ‘PTS’ range of sample holders. The station is equipped with 6 electrical contacts (2 x thermocouple type K, C or E; 2 x sample bias up to 1000V, 2 x heating current up to 20A) and sapphire ball cooling contact for liquid nitrogen cooling. The manipulator includes all of the necessary electrical, gas and mechanical feedthroughs together with stepper motor and stepper motor driver for the XY, Z, R1 and R2 axes.

The Z Axis Stepper Motor is controlled by the stepper motor driver SMCD20 (see chapter Stepper Motor Control Driver SMCD20). The XY, R1 and R2 rotations are controlled by the stepper motor driver SMCD10. All controllers are designed for easy removal prior to baking.

Technical data

Positional control X, Y Micrometer
or stepping motor
Positional control Z Handwheel
or stepping motor
Positional control R1 Stepping motor
Positional control R2 Stepping motor
Pressure range: 1 bar to 10-11 mbar
Operating temperature -25°C to +60°C
Bakeout temperature 150°C
Standard base flange DN 100CF or 
DN 160CF
Travelling flange DN 40CF or 
XY Range ± 12.5 mm
Resolution (manual / motorised) 5 μm / 1 μm
Z Range 75 - 800 mm
Resolution (manual / motorised) 50 μm / standard 10 μm 
(1 μm on request)
R1 Range ± 180°
Resolution (motorised) 0.1°
R2 Range 360° continuous
Resolution (motorised) 0.1°