6 Axes Manipulator



The manipulator is a high precision, high rigidity, UHV specimen manipulator of modular construction, suitable for a range of X, Y and Z linear motions and R1, R2 and R3 rotations. The modular construction means that the specification can be upgraded or modified by the addition to replacement of well defined modules.


The 6 Axes Manipulators are used for manipulating sample holders and scientific tools with respect to a sample’s position. These manipulators, when combined with sample holders, allow precise placement and manipulation of samples in UHV environments. The manipulators themselves move the sample in three orthogonal axes, X, Y, and Z while the rotary drives provide rotation R1, R2 and R3 around the Z and Y axes. They can work in any orientation.

Additional information

The 6 Axes Manipulators are configured with a Sample Receiving Station that accepts one of our ‘PTS’ range of sample holders. The station is equipped with 6 electrical contacts (2 x thermocouple type K, C or E; 2 x sample bias up to 1000V, 2 x heating current up to 20A) and sapphire ball cooling contact for liquid nitrogen or helium cooling. The manipulator includes all of the necessary electrical, gas and mechanical feedthroughs together with stepper motor and stepper motor driver for the XY, Z, R1, R2 and R3 axes. The Z Axis Stepper Motor is controlled by the stepper motor driver SMCD20. The XY, R1, R2 and R3 rotations are controlled by the stepper motor driver SMCD10. All controllers are designed for easy removal prior to baking.

Technical data

Positional control X, Y Micrometer or stepper motor
Positional control Z Handwheel or stepper motor
Positional control R1 Stepper motor
Positional control R2 Stepper motor
Positional control R3 Stepper motor
Pressure range: 1 bar to 10-11mbar
Operating temperature -25°C to +60°C
Bakeout temperature 150°C
Standard base flange DN 160CF
XY range ± 8.0 mm
Resolution (manual/motorised) 5 μm / 1 μm
Z range up to 500 mm
Resolution (manual/motorised) 1 mm / standard 10 μm(1 μm on request)
R1 range ± 180° or 360°
Resolution (motorised) 0.1°
R2 range 360° - continuous
Resolution (motorised) 0.1°
R3 Range -10° to 10° 
Resolution (motorised) 0.1°