Ion Source 40C1


The Ion Source IS 40C1 is a compact, easy-to-use extractor type ion gun for sample surface cleaning. The source generates an ion current of >70μA/cm2 (Argon) with Gaussian beam profile. The source insertion length is adaptable to individual requirements (standard – 63 mm).


  • Operation with inert (Ar) & reactive gases (O2, H2, hydrocarbons with reduced lifetime)
  • High Ion Beam Current
  • Long lifetime
  • High stability
  • Software control (basic version)


  • Software extension – can be integrated with RAPID SE
  • Gas dosing system
  • Customised insertion length
  • Linear shift


Technical data

Mounting flange: DN 40CF  
Bakeout temperature: 250°C
Water cooling: Not required
Current density > 120 μA/cm2 (for distance 30 mm)
Insertion length: min. 63 mm, others on request, OD: 35mm
Energy range: 0.12 keV – 5 keV  
Spot size: 3 mm for distance 30 mm (dependent on working distance)
Cathode type: Yttrium oxide coated Iridium filament