Ion Source 40E1
The IS 40E1 Ion Source is a two lens, extractor type, focused, differentially pumped ion gun. The Source is able to raster a 10 mm x 10 mm area of the surface at the recommended working distance. It is particularly suitable for depth profiling in XPS, ISS and SIMS. The Source can be also used for sample surface cleaning.
Features
- Specially configured nose cone
- Operation with inert (Ar) & reactive gases (O2, H2, hydrocarbons with reduced lifetime)
- Continuously variable spot size
- Extremely homogeneous crater/beam profile
- Field replaceable low operating temperature filament
- UHV gas inlet
- UHV conditions maintained in chamber
- Integrated scan and deflection unit
- Software control (basic version)
Options
- Software extension – can be integrated with RAPID SE
- Gas dosing system
- Wien mass filter
- Linear shift
- Differential pumping (2 stages)
Technical data
| Mounting flange: | Rotatable, DN 40CF |
| Bakeout temperature: | 250°C |
| Water cooling: | Not required |
| current density | Up to 4 mA / cm2 (for distance 23 mm) |
| Insertion length: | 163 mm (standard) |
| Energy range: | 0.15 keV - 5 keV |
| cone angle: | Small, 50° |
| Spot size: | < 150 μm for distance 23 mm |
| Scan area: | 10 mm x 10 mm (for working distance of 23 mm) |
| Cathode type: | Yttrium oxide coated Iridium filament |