XYZ Mini Manipulator
Description
The XYZ Mini Manipulator is a precision, high rigidity UHV specimen translator having X, Y and Z motions. The standard mounting flange is DN 63CF and the standard travelling flange is DN 40CF. All three axes are merged in one miniature stage that delivers outstanding performance at exceptionally low prices. The translators can work in any orientation.
Application
The XYZ Mini Manipulator has been designed for ease and convenience of use. X and Y movement is +/- 12,5 mm, depending on the accessories that are fitted. Z movement is 75-250 mm, depending on the application.
Additional information
Only the Z movement can be motorised.
Technical data
| Positional control X, Y | Micrometer |
| Positional control Z | Handwheel |
| Bakeout temperature | 150°C |
| Mounting flange | DN 63CF or DN 100CF |
| Travelling flange | DN 40CF |
| XY range | ±12.5 mm |
| Resolution | 5 μm |
| Repeatability | 5 μm |
| Z range | 75 - 200 mm |
| Resolution Z (manual) | 0.05 mm |