2 axes deposition manipulator



The 2 Axes Motorised MBE Manipulator is a high precision, high rigidity, UHV specimen manipulator of modular construction, suitable for a range of R1 motorised continuous substrate rotation and Z translation. It is prepared to heat the substrate up to 1400°C with accuracy +/- 1°C. The station includes the substrate (sample holder) positioner and allows precise angular position of substrate in relation to linear shutter.


The 2 Axes Motorised MBE Manipulator is designed for MBE applications under ultra-high vacuum conditions. Heating is via resistive and EB methods. The Manipulator can work in the vertical orientation.

Technical data

Positional control Z Handwheel
Positional control R1 Servomotor
Pressure range: 1 bar to 10-11mbar
Sample cooling temperature down to 7K
Operating temperature -25°C to +60°C
Bakeout temperature 150°C
Standard base flange DN 200CF
Shutter Pneumatic operated
Sample temperature ‹ 1400ºC (±1ºC)
Z range 50 mm
Resolution (manual/motorised) 5 μm / 1 μm
R1 range 360° - continuous
Resolution (motorised) 0.1°
Max speed 80 rpm