Preparation Chambers

Application

Preparation chambers provide versatile in-situ preparation facilities ranging from standard sample preparation techniques and thin film growth, sputtering and annealing, to advanced preparation techniques with in-situ characterisation.

They typically have numerous UHV ports for the connection of various types of surface preparation techniques. Our standard versatile preparation chambers provide enough ports and facilities for most current and future requirements but we will also be happy to fabricate to your individual specifications.

Specification

Preparation chambers are equipped with a range of UHV ports of various standard sizes. They are designed typically for base pressures between 1x10-10 mbar and 1x10-11 mbar.

Preparation chambers are typically equipped with:

• Precision manipulator


• Pump system


• Viewports

• Pressure gauges


• Electron beam evaporators


• Effusion cells


• Quartz oscillator


• Different type of analysers


• Ion sources for surface cleaning