Radial Distribution Chambers (UFO)

Application

The radial distribution chambers (UFO) are designed to transfer samples between multiple preparation and analysis chambers that are connected to it. The chambers are normally mounted at the centre of a series of chambers, acting as a central distribution hub for cluster tools.

Specification

• Distribution chamber body diameters from 500 to 900 mm


• Configured with TSP and transfer mechanism with rack-and-pinion rotary motion feedthrough

• Up to 8 transfer positions to other UHV chambers with automatic sample positioning


• Guaranteed base pressure <1x10-10 mbar after 48h of bakeout

• Numerous viewports


• Equipped with UHV connecting flanges and additional ports for future versatility