XYZ Manipulator



The XYZ Manipulator is a precision, high rigidity UHV specimen translator having X, Y and Z motions. The standard mounting flange is DN 100CF or DN 160CF and the standard travelling flange is DN 40CF or DN 63CF. It is a combination of XY Stage and Z Slide. The translators can work in any orientation.


The XYZ Manipulator has been designed for ease and convenience of use. X and Y movement is +/- 12.5 mm, depending on the accessories that are fitted. Z movement is 75-800 mm, depending on the application.

Additional information

The XYZ Manipulators can be fully motorised in the same way as individual motorisation of the XY Stages and Z Slides.

Technical data

Positional control X, Y Micrometer
Positional control Z Handwheel
Bakeout temperature 150°C
Mounting flange DN 100CF or DN 160CF
Travelling flange DN 40CF or DN 63CF
XY range ±12.5 mm
Resolution (manual/motorised) 5 μm / 1 μm
Z range 75 - 800 mm
Resolution Z (manual/motorised)

50 μm / standard 10 μm

(1 μm on request)