XYZ Manipulator
Description
The XYZ Manipulator is a precision, high rigidity UHV specimen translator having X, Y and Z motions. The standard mounting flange is DN 100CF or DN 160CF and the standard travelling flange is DN 40CF or DN 63CF. It is a combination of XY Stage and Z Slide. The translators can work in any orientation.
Application
The XYZ Manipulator has been designed for ease and convenience of use. X and Y movement is +/- 12.5 mm, depending on the accessories that are fitted. Z movement is 75-800 mm, depending on the application.
Additional information
The XYZ Manipulators can be fully motorised in the same way as individual motorisation of the XY Stages and Z Slides.
Technical data
Positional control X, Y | Micrometer |
Positional control Z | Handwheel |
Bakeout temperature | 150°C |
Mounting flange | DN 100CF or DN 160CF |
Travelling flange | DN 40CF or DN 63CF |
XY range | ±12.5 mm |
Resolution (manual/motorised) | 5 μm / 1 μm |
Z range | 75 - 800 mm |
Resolution Z (manual/motorised) |
50 μm / standard 10 μm (1 μm on request) |